Scanning Microscopy for Nanotechnology: Techniques and Applications

Przednia okładka
Weilie Zhou, Zhong Lin Wang
Springer Science & Business Media, 9 mar 2007 - 522
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Scanning electron microscopy (SEM) can be exploited not only for nanomaterials characterization but also integrated with new technologies for in-situ nanomaterials engineering and manipulation. Scanning Microscopy for Nanotechnology addresses the rapid development of these techniques for nanotechnology, in both technique and application chapters by leading practitioners. The book covers topics including nanomaterials imaging, X-ray microanalysis, high-resolution SEM, low kV SEM, cryo-SEM, as well as new techniques such as electron back scatter diffraction (EBSD) and scanning transmission electron microscopy (STEM). Fabrication techniques integrated with SEM, such as e-beam nanolithography, nanomanipulation, and focused ion beam nanofabrication, are major new dimensions for SEM application. Application areas include the study of nanoparticles, nanowires and nanotubes, three-dimensional nanostructures, quantum dots, magnetic nanomaterials, photonic structures, and bio-inspired nanomaterials. This book will appeal not only to a broad spectrum of nanomaterials researchers, but also to SEM development specialists.

 

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Spis treści

Fundamentals of Scanning Electron
1
Applications of FIB and DualBeam
8
Backscattering Detector and EBSD in Nanomaterials
41
Data Measurement
51
Applications
61
Current Limitations and Future
74
Low kV Scanning Electron Microscopy
101
Ebeam Nanolithography Integrated with Scanning
120
Carbon Nanotubes
267
Conclusions
278
Photonic Crystals and Devices
281
SEM Imaging of Photonic Crystals
289
Fabrication of Photonic Crystals in SEM
298
Summary
302
Nanoparticles and Colloidal Selfassembly
306
Metal Nanoparticles
307

Scanning Transmission Electron Microscopy
152
Introduction to InSitu Nanomanipulation
192
Nanofabrication
225
Onboard Digital Patterning with the Ion Beam
226
FIB Milling or CVD Deposition with Bitmap Files
230
Onboard Digital Patterning with the Electron Beam
231
Automation for Nanometer Control
233
Direct Fabrication of Nanoscale Structures
234
Nanowires and Carbon Nanotubes
237
IIVI Compound Semiconductors Nanowires
250
Elemental Nanowires
260
Mesoporous and Nanoporous Metal Nanostructures
322
Nanocrystalline Oxide
329
Nanostructured Semiconductor and Thermoelectric Materials
347
Conclusions
353
Nanobuilding Blocks Fabricated through Templates
357
Onedimensional Wurtzite Semiconducting
384
Bioinspired Nanomaterials
427
CryoTemperature Stages in Nanostructural
467
Author Index
491
Subject Index
513
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