Introduction to Focused Ion Beams: Instrumentation, Theory, Techniques and Practice

Przednia okładka
Lucille A. Giannuzzi, North Carolina State University
Springer Science & Business Media, 18 maj 2006 - 357
Introduction to Focused Ion Beams is geared towards techniques and applications. This is the only text that discusses and presents the theory directly related to applications and the only one that discusses the vast applications and techniques used in FIBs and dual platform instruments.
 

Co mówią ludzie - Napisz recenzję

Nie znaleziono żadnych recenzji w standardowych lokalizacjach.

Spis treści

THE FOCUSED ION BEAM INSTRUMENT
1
ION SOLID INTERACTIONS
13
FOCUSED ION BEAM GASES FOR DEPOSITION AND ENHANCED ETCH
53
THREEDIMENSIONAL NANOFABRICATION USING FOCUSED ION BEAMS
73
DEVICE EDITS AND MODIFICATIONS
87
THE USES OF DUAL BEAM FIB IN MICROELECTRONIC FAILURE ANALYSIS
107
HIGH RESOLUTION LIVE IMAGING OF FIB MILLING PROCESSES FOR OPTIMUM ACCURACY
133
FIB FOR MATERIALS SCIENCE APPLICATIONS A REVIEW
143
FOCUSED ION BEAM SECONDARY ION MASS SPECTROMETRY FIBSIMS
269
QUANTITATIVE THREEDIMENSIONAL ANALYSIS USING FOCUSED ION BEAM MICROSCOPY
281
APPLICATION OF FIB IN COMBINATION WITH AUGER ELECTRON SPECTROSCOPY
301
Ga Ion Sputter Yields
328
Backsputtered Ga Ion Fraction
331
30 keV Ga Ion Range at 0 degrees
336
30 keV Ga Ion Range at 88 degrees
339
5 keV Ga Ion Range at 0 degrees
345

PRACTICAL ASPECTS OF FIB TEM SPECIMEN PREPARATION
173
FIB LIFTOUT SPECIMEN PREPARATION TECHNIQUES
201
A FIB MICROSAMPLING TECHNIQUE AND A SITE SPECIFIC TEM SPECIMEN PREPARATION METHOD
229
DUALBEAM FIBSEM SYSTEMS
246
5 keV Ga Ion Range at 88 degrees
348
Notes
351
Index
352
Prawa autorskie

Inne wydania - Wyświetl wszystko

Kluczowe wyrazy i wyrażenia

Informacje bibliograficzne